Motorized Stages
Guide
Piezo Guide
For the guide mechanism, Sigma fine stages adopted a guide system that utilizes elastic
deformation of metals and a mechanism to increase deformation of piezo elements.
These originally
designed stages achieved readable resolution of 10nm during closed loop control, ideal for uses that require
high-speed high-precision positioning.
Structure of Sigma Fine Stage
Piezo actuator and displacement magnification mechanism offer a large operating range.
Digital Sensor
Closed loop control is possible with a digital sensor that does not require any high precision analog amplifier or AD conversion circuit.
Operating Environment of Sigma Fine Stage
Use fine stages within the following operating environment temperature range.
Contact us separately if you
desire to use the stages outside the operating environment temperature range.
| * Operating environment | * Recommended environment |
|---|---|
| Temperature : 10°C - 30°C | Temperature : 20°C ± 1°C |
| Humidity : 20％ - 60％ (without condensation) | Humidity : 40％ or lower |
Since durability of piezo elements used in the SFS/SFS-H stage series will deteriorate in high humidity environments, use them in the above environments.
Sigma Fine System Chart
Accuracy Measurement Example : Sigma Fine Stage System SFS-H (Linear Stage)
0⇔75µm pulse rate (16Hz)
Closed loop control
by SFS-H60X at 150g load
0⇒1µm step convergence data (15msec)
Closed loop control
by SFS-H60X at 150g load
The following graph shows the hysteresis curve unique to piezo actuators during open loop control travel.
0⇔80µm positional repeatability
50nm or lower
by SFS-H60X at 150g load
0⇔80µm positional repeatability
50nm or lower
by SFS-H60X at 150g load
Characteristics when feed amount is small in closed loop control. Hysteresis disappears in open loop control.
Deviation from the straight line in the direction of travel.
Tilt around the axis in the horizontal plane perpendicular to the direction of travel.
Rotation around the axis in the vertical plane perpendicular to the direction of travel.
Follow-up example with Respect to Analog Input: SFS-H (Linear Stage) *Controlled by FINE-01γ
High Speed Convergence Data Input waveform: Navy/Output waveform: Light blue