Motorized Single Axis Stage Series 20 Travel 85mm for Vacuum

VSGSP20-85(X)

CE
Motorized SGSP stages modified for use in high vacuum.
◦Linear stages have available travel between 35 − 200mm and has a similar footprint to the SGSP series.
More Information
Name Motorized Single Axis Stage Series 20 Travel 85mm for Vacuum
Weight 1.1000kgs
Guide
  • Includes 1m teflon coated cables to connect the vacuum motor and vacuum limit switches to the chamber feedthrough connector.
Attention -
Image Label Motorized Single Axis Stage Series 20 Travel 85mm for Vacuum
Travel 85mm
Load Capacity 39.2N (4.0kg)
Travel 85mm
Stage Size 60×60mm
Feed Screw Precision ground screw φ6mm、 1mm lead
Positioning Slide Outer rail structure
Stage Material Aluminium・Stainless steel
Finish None
Resolution (Half) 2μm/pulse
Resolution (Full) 1μm/pulse
Minimum Incremental Motion (refurence) 0.2μm
MAX Speed 10mm/sec
Positional Repeatability 5μm
Load Capacity 39.2N(4.0kgf)
Lost Motion 3μm
Sensor Part Number GN-PT5M3B-1 (Metrol Co., Ltd.)
Limit Sensor Vacuum touch sensor (NORMAL CLOSE)
Origin Sensor None
Proximity Origin Sensor None
In stock
SKU
VSGSP20-85(X)
$7,985.00

Delivery in : 2 weeks

Motorized SGSP stages modified for use in high vacuum.

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