Motorized Single Axis Stage Series 20 Travel 85mm for Vacuum
VSGSP20-85(X)
Motorized SGSP stages modified for use in high vacuum.
◦Linear stages have available travel between 35 − 200mm and has a similar footprint to the SGSP series.
Name | Motorized Single Axis Stage Series 20 Travel 85mm for Vacuum |
---|---|
Weight | 1.1000kgs |
Guide |
|
Attention | - |
Image Label | Motorized Single Axis Stage Series 20 Travel 85mm for Vacuum |
Travel | 85mm |
Load Capacity | 39.2N (4.0kg) |
Travel | 85mm |
Stage Size | 60×60mm |
Feed Screw | Precision ground screw φ6mm、 1mm lead |
Positioning Slide | Outer rail structure |
Stage Material | Aluminium・Stainless steel |
Finish | None |
Resolution (Half) | 2μm/pulse |
Resolution (Full) | 1μm/pulse |
Minimum Incremental Motion (refurence) | 0.2μm |
MAX Speed | 10mm/sec |
Positional Repeatability | 5μm |
Load Capacity | 39.2N(4.0kgf) |
Lost Motion | 3μm |
Sensor Part Number | GN-PT5M3B-1 (Metrol Co., Ltd.) |
Limit Sensor | Vacuum touch sensor (NORMAL CLOSE) |
Origin Sensor | None |
Proximity Origin Sensor | None |
In stock
SKU
VSGSP20-85(X)
$7,985.00
Motorized SGSP stages modified for use in high vacuum.