Piezo Stages

We offer three types of piezo stages, each with unique features and benefits: • Piezomotor Stages: These stages provide the best overall features, including long motorized travel and ultra-fine 20nm resolution. The piezomotor mechanism allows them to maintain their position even when de-energized. The static friction acts as a locking mechanism, ensuring excellent stability. The piezomotor motion is audible at 100-120Hz. Piezomotor stages are available as linear stages, rotation stages, and goniometers, with vacuum-compatible versions also available. • Piezo-Assist Stages: These stages also offer ultra-fine 20nm resolution but only over a very short range of ~30μm. Unlike piezomotor stages, which travel in steps, piezo-assist motion is continuous. Coarse travel is provided by manually adjusting a standard micrometer. The piezo element requires power to remain activated to hold its position. Piezo-assist motion is not audible. • Piezo Feedback Stages: These stages offer the best resolution of all three types at 10nm but over a relatively short 100μm range. Thanks to the feedback sensor, these stages have a repeatability specification of less than 0.1μm. Unlike piezo-assist stages, they do not have any means of long travel. The piezo element requires power to remain activated to hold its position. Piezo-Feedback stage motion is not audible.