Motorized Linear Stages

Selection Guide for Linear Motorized Stages

Groups	Description	Travel Ranges	Platform Sizes	Load Capacity	Mounting Threads	Max. Speed	Repeatability	Minimum Incremental Motion	Axis Options
Low-Cost Stages	HPS motorized stages, with ball screws and extended contact bearings offer mid to upper level performance at a low price.	20, 50, 60 mm	60X60 80X80 120X120mm	5 – 10kg	Metric: M4	10mm/sec	±1μm	0.1μm	X-axis
Compact Stages	TAMM motorized crossed roller stages combine compactness, low-profile, and high durability. They feature anti-creep crossed roller bearings, special nut-shape ball screw, and black anodized aluminum body.	10, 15, 50, 100mm	40X40 60X60 100X100 100X175mm	3 – 10kg	Metric: M4	10mm/sec	±1μm	0.1-0.2μm	X-axis XY-axes
Standard Stages	OSMS standard stepping motor driven stages have the most SKU options of all our stages. They are ideal for positioning of measuring instruments or inspection tools from which high stiffness and high precision are required.	35, 50, 85, 100, 200, 300, 500mm	85X85 100X100 100X175 120X120mm	3-20kg	Metric: M4, M6 Imperial: ¼-20	25-40mm/sec	±±1.5 - 3μm	0.2-0.4μm	X-axis XY-axes XYZ-axes Z-axis
High Load Stages	HST stages are fitted with precision ball screws and precision crossed roller. The combination of HST Series and 3 axis Stage Controllers HSC-103 can perform low-noise and low-vibration operation, compared with conventional products. Steel body offers excellent stiffness and high load capacity.	50, 100, 200mm	165X165 165X220 165X420mm	40kg	Metric: M4, M6	10-20mm/sec	±1μm	0.1μm	X-axis
Closed-Loop Feedback Stages	OSMS(CS) closed loop motorized stages have optical scales making them a highly accurate and reliable system. The compact scale is built in to keep the envelope dimensions the same as that of the equivalent open loop OSMS series.	35, 85, 100, 200, 300, 500mm	85X85 100X100 120X120mm	3-20kg	Metric: M4, M6 Imperial: ¼-20	25-100mm/sec	±1 - 1.5μm	0.2-0.4μm	X-axis
AC Servo Motor Stages	SGMV High accuracy / high stiffness stages are driven by AC servo motors. AC motors incorporate encoders for providing feedback and closed-loop control. These motors can be positioned to high accuracy.	35, 85, 100, 200mm	60X60 80X80	8-13kg	Metric: M4, M6	35mm/sec	±2μm - 3μm	2μm	X-axis
Nano-Resolution Stage Systems	FS- Stages have up to 1nm positioning resolution. In-house optical linear encoders are built-in at the center of stage to detect position which is achieved by feedback control using position information of the encoder. They are ideal for collecting the data over a wide range.	20, 50, 100, 150, 200, 300, 400mm	60X60 80X80 120X120 120X170 160X230mm	5 – 10kg	Metric: M4, M6	5mm/sec	±0.002-0.010μm	0.001-0.050μm	1nm X-axis 5nm X-axis 10nm X-axis 50nm X-axis
Vertical Travel Flat Stages	OSMS Z axis stages offer high stiffness and high precision. The mounting platform is oriented parallel to the base and is perpendicular to the direction of travel to minimize footprint.	5, 10, 20mm	40X40 60X60 80X80mm	2-15kg	Metric: M3, M4	1-4mm/sec	±2.5μm	0.05-0.10μm	Z-axis
Silent Ultrasonic Linear Stages	PKA translation stages provide silent, high resolution position. While the drive source is a small ultrasonic motor, high load capacity of 2gk is ensured.	15, 20mm	40X40 60X60mm	2kg	Metric: M3, M4	0.5mm/sec	3.5-16mm	2μm	X-axis
Fine Piezo Stages	SFS piezo stages offer high precision and resolution positioning by utilizing full closed loop control with digital frequency based sensors. Using piezo element actuators, minimum incremental motion as small as 1nm.	266, 355, 532nm	40X40 60X60mm	7-15kg	Metric: M3, M4	NA	±0.05 μm	0.001-0.050μm	X-axis XY-axes
Miniature Linear Stage	These objectives are designed with compensation for cover glass-thickness aberrations, making it possible to realize ideal beam spot size and quality while processing thorough a cover glass. These objective lenses can be used for laser repair processing for LCD or OLED modules.	10mm	25X25mm	2kg	Metric: M2	10mm/sec	±1.5 μm	2μm	X-axis
Vacuum Compatible Stages	Motorized VSGSP stages are modified for use in high vacuum. These linear stages have available travel between 35 − 200mm and have a similar footprint to the SGSP series.	35, 85, 200mm	60X60 80X80mm	39-59kg	Metric: M3, M4	10-20mm/sec	±2.5 - 5μm	0.2μm	X-axis
Piezo-Assist Stages	TADC-SPA stages allow fine adjustment of 20nm or less by having a piezo assist mechanism integrated into the manual stage. They are ideal for manual stage units and systems that require high resolution position adjustment.	6, 13mm	25X25 40X40 60X60mm	4-5kg	Metric: M3, M4	NA	NA	0.020μm	X-axis XY-axes Z-axis