300mm Travel X-axis Motor Stage, 50nm resolution, 160X160mm, M4 Thd
FS-3300X
FS-X is feedback stage with sub-micron resolution positioning..
In-house optical linear encoder are built-in at the center of stage to detect position.
Positioning to target position, positioning repeatability and holding the position with high resolution is achieved by feedback control using position information of encoder.
There are seven types of the stages. It is ideal for collecting the data in a wide range or for performing precise positioning and movement of a sample on a single stage by the large travel range.
In-house optical linear encoder are built-in at the center of stage to detect position.
Positioning to target position, positioning repeatability and holding the position with high resolution is achieved by feedback control using position information of encoder.
There are seven types of the stages. It is ideal for collecting the data in a wide range or for performing precise positioning and movement of a sample on a single stage by the large travel range.
| Name | 300mm Travel X-axis Motor Stage, 50nm resolution, 160X160mm, M4 Thd |
|---|---|
| Weight | 8.5000kgs |
| Stage Size | 160×160mm |
| Travel | 300mm |
| Stage Size | 160×160mm |
| Positioning Slide | LM Guide |
| Feed Screw | Ball screw diameter φ14mm, 5mm lead |
| Driving Motor | □42mm 5 phase stepping motor |
| Weight | 8.5㎏ |
| Minimum Resolution *1 FC-411 | - |
| Minimum Resolution *1 FC-414 | 50nm |
| Positional Repeatability *1 FC-411 | - |
| Positional Repeatability *1 FC-414 | ±100nm |
| Load Capacity | 196N(20kgf) |
| Maximum Travel Speed | 10μm |
| *1 Minimum resolution and position repeatability accuracy for built-in scale read. | |
| Primary Material | Aluminum |
| Finish | Black anodized |
| Motor Type | Equipped |
| Limit Sensor | None |
| Origin Sensor | None |
| Proximity Origin Sensor | None |
| Signal Cycle | 4μm |
| Scale Cable* | 2m *Scale cable comes directly out of the stage. Please prepare "extension cable for scale" separately if 2m or longer cable are needed. |
| Compatible Controller |
FC-411: FS-1020X, FS-1050X, FS-1100X, FS-3150X FC-414: FS-3200X, FS-3300X, FS-3400X |
| Compatible Cable |
PM-CA: FS-1020X, FS-1050X, FS-1100X, FS-3150X PM4N-CA*SD: FS-3200X, FS-3300X, FS-3400X |
In stock
SKU
FS-3300X
$7,956.00
Customize product
FS-X is feedback stage with sub-micron resolution positioning..
In-house optical linear encoder are built-in at the center of stage to detect position.
Positioning to target position, positioning repeatability and holding the position with high resolution is achieved by feedback control using position information of encoder.
There are seven types of the stages. It is ideal for collecting the data in a wide range or for performing precise positioning and movement of a sample on a single stage by the large travel range.
In-house optical linear encoder are built-in at the center of stage to detect position.
Positioning to target position, positioning repeatability and holding the position with high resolution is achieved by feedback control using position information of encoder.
There are seven types of the stages. It is ideal for collecting the data in a wide range or for performing precise positioning and movement of a sample on a single stage by the large travel range.
Resources & Downloads
Related Products
Check items to add to the cart or
