150mm Travel X-axis Motor Stage, 50nm resolution, 120X170mm, M4 Thd

FS-3150X

FS-X is feedback stage with sub-micron resolution positioning..
In-house optical linear encoder are built-in at the center of stage to detect position.
Positioning to target position, positioning repeatability and holding the position with high resolution is achieved by feedback control using position information of encoder.
There are seven types of the stages. It is ideal for collecting the data in a wide range or for performing precise positioning and movement of a sample on a single stage by the large travel range.
More Information
Name 150mm Travel X-axis Motor Stage, 50nm resolution, 120X170mm, M4 Thd
Weight 2.8000kgs
Stage Size 120×170mm
Travel 150mm
Stage Size 120×170mm
Positioning Slide LM Guide
Feed Screw Ball screw diameter φ8mm, 1mm lead
Driving Motor □28mm 5 phase stepping motor
Weight 2.8㎏
Minimum Resolution *1 FC-411 50nm
Minimum Resolution *1 FC-414 -
Positional Repeatability *1 FC-411 ±100nm
Positional Repeatability *1 FC-414 -
Load Capacity 98N(10kgf)
Maximum Travel Speed 10μm
*1 Minimum resolution and position repeatability accuracy for built-in scale read.
Primary Material Aluminum
Finish Black anodized
Motor Type Equipped
Limit Sensor None
Origin Sensor None
Proximity Origin Sensor None
Signal Cycle 4μm
Scale Cable* 2m *Scale cable comes directly out of the stage. Please prepare "extension cable for scale" separately if 2m or longer cable are needed.
Compatible Controller FC-411: FS-1020X, FS-1050X, FS-1100X, FS-3150X
FC-414: FS-3200X, FS-3300X, FS-3400X
Compatible Cable PM-CA: FS-1020X, FS-1050X, FS-1100X, FS-3150X
PM4N-CA*SD: FS-3200X, FS-3300X, FS-3400X
In stock
SKU
FS-3150X
$7,213.00

Delivery in : 6-12 weeks

FS-X is feedback stage with sub-micron resolution positioning..
In-house optical linear encoder are built-in at the center of stage to detect position.
Positioning to target position, positioning repeatability and holding the position with high resolution is achieved by feedback control using position information of encoder.
There are seven types of the stages. It is ideal for collecting the data in a wide range or for performing precise positioning and movement of a sample on a single stage by the large travel range.

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