20mm Travel X-axis Motor Stage, 5nm resolution, 60X60mm, M4 Thd
FS-1020SPX
FS-SPX is feedback stage with 5nm resolution positioning.
In-house optical linear encoder are built-in at the center of stage to detect position.
Positioning to target position, positioning repeatability and holding the position with high resolution is achieved by feedback control using position information of encoder.
There are two types of the stage which travel of 20mm and 50mm.
In-house optical linear encoder are built-in at the center of stage to detect position.
Positioning to target position, positioning repeatability and holding the position with high resolution is achieved by feedback control using position information of encoder.
There are two types of the stage which travel of 20mm and 50mm.
| Name | 20mm Travel X-axis Motor Stage, 5nm resolution, 60X60mm, M4 Thd |
|---|---|
| Weight | 0.5000kgs |
| Stage Size | 60×60mm |
| Travel | 20mm |
| Stage Size | 60×60mm |
| Feed Screw | Ball screw diameter φ4mm, 1mm lead |
| Weight | 0.5㎏ |
| Minimum Resolution *1 | 5nm |
| Positional Repeatability *1 | ±10nm |
| Load Capacity | 49N(5kgf) |
| Maximum Travel Speed | 10μm |
| *1 Minimum resolution and position repeatability accuracy for built-in scale read. | |
| Primary Material | Aluminum |
| Finish | Black anodized |
| Motor Type | □28mm 5 phase stepping motor |
| Limit Sensor | Equipped |
| Origin Sensor | None |
| Proximity Origin Sensor | None |
| Signal Cycle | 2μm |
| Scale Cable* | 2m *Scale cable comes directly out of the stage. Please prepare "extension cable for scale" separately if 2m or longer cable are needed. |
| Compatible Controller | FC-611 |
| Compatible Cable | PM-CA-* |
In stock
SKU
FS-1020SPX
$4,774.00
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FS-SPX is feedback stage with 5nm resolution positioning.
In-house optical linear encoder are built-in at the center of stage to detect position.
Positioning to target position, positioning repeatability and holding the position with high resolution is achieved by feedback control using position information of encoder.
There are two types of the stage which travel of 20mm and 50mm.
In-house optical linear encoder are built-in at the center of stage to detect position.
Positioning to target position, positioning repeatability and holding the position with high resolution is achieved by feedback control using position information of encoder.
There are two types of the stage which travel of 20mm and 50mm.
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