Z-Axis (Vertical Travel)Vacuum Compatible Stainless Steel Piezomotor Linear Stages

TSDS-Z-PDM

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TSDS-Z-PDM

TSDS-X-PDM z-axis piezomotor linear stages are the stainess steel, vacuum compatible versions of our flagship EXC stages.

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Attention

This translation stage type is not suitable for inverted use. In this condition, all load would be pulling against the spring.
Regarding 25x25 and 40x40mm size stages, please do not apply heavy load toward the rotating (yawing) direction, as it may damage the stage.
These stages use a pivot mechanism to transfer horizontal motion to vertical motion. This mechanism induces a small non-linearity between the distance the micrometer moves and the distance the stage platform moves. Contact our Sales Division for more information.

Name Stage Size Mounting Thread Delivery Price Add to cart

40×40mm

1-3 weeks

Travel Range	5mm
Load Capacity	0.5kg
Lead of Actuator	0.25mm
Actuator Resolution	20nm
Guide Method	Extended Contact Ball Bearing Guide
Primary Material	Hardened Stainless Steel
Finish	Clean Passivated
Travel Accuracy / Straightness	2.5um
Travel Accuracy / Pitch	-
Travel Accuracy / Yaw	-
Max. Moment Capacity / Pitch	3.9Nm
Max. Moment Capacity / Roll	3.9Nm
Max. Moment Capacity / Yaw	-
Moment Stiffness / Pitch	1.2arcsec/Ncm
Moment Stiffness / Roll	1.2arcsec/Ncm
Moment Stiffness / Yaw	-
Parallelism	80um
Running Parallelism	20um

65×65mm

1/4-20UNC

1-3 weeks

Travel Range	8mm
Load Capacity	1.7kg
Lead of Actuator	0.25mm
Actuator Resolution	20nm
Guide Method	Extended Contact Ball Bearing Guide
Primary Material	Hardened Stainless Steel
Finish	Clean Passivated
Travel Accuracy / Straightness	2.5um
Travel Accuracy / Pitch	-
Travel Accuracy / Yaw	-
Max. Moment Capacity / Pitch	6.9Nm
Max. Moment Capacity / Roll	6.9Nm
Max. Moment Capacity / Yaw	-
Moment Stiffness / Pitch	0.41arcsec/Ncm
Moment Stiffness / Roll	0.41arcsec/Ncm
Moment Stiffness / Yaw	-
Parallelism	80um
Running Parallelism	20um

40×40mm

6-32UNC

1-3 weeks

Travel Range	5mm
Load Capacity	0.5kg
Lead of Actuator	0.25mm
Actuator Resolution	20nm
Guide Method	Extended Contact Ball Bearing Guide
Primary Material	Hardened Stainless Steel
Finish	Clean Passivated
Travel Accuracy / Straightness	2.5um
Travel Accuracy / Pitch	-
Travel Accuracy / Yaw	-
Max. Moment Capacity / Pitch	3.9Nm
Max. Moment Capacity / Roll	3.9Nm
Max. Moment Capacity / Yaw	-
Moment Stiffness / Pitch	1.2arcsec/Ncm
Moment Stiffness / Roll	1.2arcsec/Ncm
Moment Stiffness / Yaw	-
Parallelism	80um
Running Parallelism	20um

25×25mm

1-3 weeks

Travel Range	5mm
Load Capacity	0.5kg
Lead of Actuator	0.25mm
Actuator Resolution	20nm
Guide Method	Extended Contact Ball Bearing Guide
Primary Material	Hardened Stainless Steel
Finish	Clean Passivated
Travel Accuracy / Straightness	2.5um
Travel Accuracy / Pitch	-
Travel Accuracy / Yaw	-
Max. Moment Capacity / Pitch	3.9Nm
Max. Moment Capacity / Roll	3.9Nm
Max. Moment Capacity / Yaw	-
Moment Stiffness / Pitch	1.2arcsec/Ncm
Moment Stiffness / Roll	1.2arcsec/Ncm
Moment Stiffness / Yaw	-
Parallelism	80um
Running Parallelism	20um

65×65mm

1-3 weeks

Travel Range	8mm
Load Capacity	1.7kg
Lead of Actuator	0.25mm
Actuator Resolution	20nm
Guide Method	Extended Contact Ball Bearing Guide
Primary Material	Hardened Stainless Steel
Finish	Clean Passivated
Travel Accuracy / Straightness	2.5um
Travel Accuracy / Pitch	-
Travel Accuracy / Yaw	-
Max. Moment Capacity / Pitch	6.9Nm
Max. Moment Capacity / Roll	6.9Nm
Max. Moment Capacity / Yaw	-
Moment Stiffness / Pitch	0.41arcsec/Ncm
Moment Stiffness / Roll	0.41arcsec/Ncm
Moment Stiffness / Yaw	-
Parallelism	80um
Running Parallelism	20um

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TSDS-X-PDM z-axis piezomotor linear stages are the stainess steel, vacuum compatible versions of our flagship EXC stages.