Motorized 65X65mm EXC Bearing, Vacuum Compatible, Stainless Steel, X-Axis Stage, Side Piezomotor, +/-6.5mm, M6 Threads
TSDS-651S-M6-PDM
Stainless Steel Linear Stages suitable for hard vacuum and clean room applications. Top and bottom plates made completely of hardened and passivated stainless steel for excellent corrosion resistance and cleanliness.
EXC bearing ways are machined into the plates and can never lose preload, especially in applications with vibration. Both the stage and the piezomotor actuator are lubricated with a high grade vacuum grease (YVAC2).
EXC bearing ways are machined into the plates and can never lose preload, especially in applications with vibration. Both the stage and the piezomotor actuator are lubricated with a high grade vacuum grease (YVAC2).
One of the key benefits of piezomotor actuation is that the static friction, which is in effect when the piezomotor is not operating, also acts like a locking mechanism which ensures excellent stability. Another convenient feature of these actuators is that the electrical cable is removable from both the actuator and the controller. Please note that these actuators do not have internal feedback and therefore are open-loop. Vacuum compatible versions are available. If your application needs different specifications we can customize our piezomotor actuators to your unique requirements.
| Name | Motorized 65X65mm EXC Bearing, Vacuum Compatible, Stainless Steel, X-Axis Stage, Side Piezomotor, +/-6.5mm, M6 Threads |
|---|---|
| Weight | 0.5500lbs |
| Remark | The cable used to connect the piezomotor actuator to a controller, like the PDM-ID-02 or the PAM-104, is included with the stage. |
| Attention |
|
| Stage Size | 65×65mm |
| Mounting Thread | M6 |
| Travel Range | 13mm |
| Load Capacity | 24kg |
| Actuator Position | Side |
| Lead of Actuator | 0.25mm |
| Actuator Resolution | 20nm |
| Guide Method | Extended Contact Ball Bearing Guide |
| Primary Material | Hardened Stainless Steel |
| Finish | Clean Passivated |
| Travel Accuracy / Straightness | 0.5um |
| Travel Accuracy / Pitch | 25arcsec |
| Travel Accuracy / Yaw | 15arcsec |
| Max. Moment Capacity / Pitch | 13.0Nm |
| Max. Moment Capacity / Roll | 14.7Nm |
| Max. Moment Capacity / Yaw | 10 |
| Moment Stiffness / Pitch | 0.08arcsec/Ncm |
| Moment Stiffness / Roll | 0.05arcsec/Ncm |
| Moment Stiffness / Yaw | 0.08 |
| Parallelism | 15um |
| Running Parallelism | 7um |
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SKU
TSDS-651S-M6-PDM
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Stainless Steel Linear Stages suitable for hard vacuum and clean room applications. Top and bottom plates made completely of hardened and passivated stainless steel for excellent corrosion resistance and cleanliness.
EXC bearing ways are machined into the plates and can never lose preload, especially in applications with vibration. Both the stage and the piezomotor actuator are lubricated with a high grade vacuum grease (YVAC2).
EXC bearing ways are machined into the plates and can never lose preload, especially in applications with vibration. Both the stage and the piezomotor actuator are lubricated with a high grade vacuum grease (YVAC2).
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