Vacuum Compatible Linear Stages1 Axis (X/Y)

VSGSP-(X)

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VSGSP-(X)

Motorized SGSP stages modified for use in high vacuum.

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details

VTAMM60S-20X

20mm

29.4N (3.0kg)

6-12 weeks

$5,043.00

Travel	20mm
Stage Size	60×60mm
Feed Screw	Precision ground screw φ4mm、0.5mm lead
Positioning Slide	Crossed roller
Stage Material	Aluminium
Finish	None
Resolution (Half)	1μm/pulse
Resolution (Full)	0.5μm/pulse
MAX Speed	5mm/sec
Positional Repeatability	6μm
Load Capacity	29.4N(3.0kgf)
Lost Motion	5μm
Censer type	GN-PT5M3B-1 (Metrol Co., Ltd.)
Limit Sensor	Vacuum touch sensor (NORMAL CLOSE)
Origin Sensor	None
Proximity Origin Sensor	None

details

VSGSP26-200(X)

200mm

58.8N (6.0kg)

2 weeks

$8,405.00

Travel	200mm
Stage Size	80×80mm
Feed Screw	Precision ground screw φ8mm、 2mm lead
Positioning Slide	Outer rail structure
Stage Material	Aluminium・Stainless steel
Finish	None
Resolution (Half)	4μm/pulse
Resolution (Full)	2μm/pulse
Minimum Incremental Motion (refurence)	0.2μm
MAX Speed	20mm/sec
Positional Repeatability	10μm
Load Capacity	58.8N(6.0kgf)
Lost Motion	10μm
Sensor Part Number	GN-PT5M3B-1 (Metrol Co., Ltd.)
Limit Sensor	Vacuum touch sensor (NORMAL CLOSE)
Origin Sensor	None
Proximity Origin Sensor	None

details

VSGSP20-35(X)

±35mm

39.2N (4.0kg)

2 weeks

$7,880.00

Travel	35mm
Stage Size	60×60mm
Feed Screw	Precision ground screw φ6mm、 1mm lead
Positioning Slide	Outer rail structure
Stage Material	Aluminium・Stainless steel
Finish	None
Resolution (Half)	2μm/pulse
Resolution (Full)	1μm/pulse
Minimum Incremental Motion (refurence)	0.2μm
MAX Speed	10mm/sec
Positional Repeatability	5μm
Load Capacity	39.2N(4.0kgf)
Lost Motion	3μm
Sensor Part Number	GN-PT5M3B-1 (Metrol Co., Ltd.)
Limit Sensor	Vacuum touch sensor (NORMAL CLOSE)
Origin Sensor	None
Proximity Origin Sensor	None

details

VSGSP20-85(X)

85mm

39.2N (4.0kg)

6-12 weeks

$7,985.00

Travel	85mm
Stage Size	60×60mm
Feed Screw	Precision ground screw φ6mm、 1mm lead
Positioning Slide	Outer rail structure
Stage Material	Aluminium・Stainless steel
Finish	None
Resolution (Half)	2μm/pulse
Resolution (Full)	1μm/pulse
Minimum Incremental Motion (refurence)	0.2μm
MAX Speed	10mm/sec
Positional Repeatability	5μm
Load Capacity	39.2N(4.0kgf)
Lost Motion	3μm
Sensor Part Number	GN-PT5M3B-1 (Metrol Co., Ltd.)
Limit Sensor	Vacuum touch sensor (NORMAL CLOSE)
Origin Sensor	None
Proximity Origin Sensor	None

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◦Linear stages have available travel between 35 − 200mm and has a similar footprint to the SGSP series.