1nm-Resolution Stage System

FS-UPX

1nm-Resolution Stage System
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SKU
FS-UPX
FS-UPX is feedback stage with 1nm resolution positioning.
FS-UPX series operates faster than high torque type FS-SPX series.
In-house optical linear encoder are built-in at the center of stage to detect position.
Positioning to target position, positioning repeatability and holding the position with high resolution is achieved by feedback control using position information of encoder.
There are two types of the stage which travel of 20mm and 50mm.
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Name Stage Size Delivery Price Add to cart
i
20mm Travel X-axis Motor Stage, 1nm resolution, 60X60mm, M4 Thd
FS-1020UPX
60×60mm
6-12 weeks
€6,900.00
Travel 20mm
Stage Size 60×60mm
Weight 49N(5kgf)
Minimum Resolution *1 1nm
Positional Repeatability *1 ±2nm
Running Parallelism 10μm
Maximum Travel Speed 5mm/sec
*1 Minimum resolution and position repeatability accuracy for built-in scale read.
Primary Material Aluminum
Finish Black anodized
Motor Type □28mm 5 phase stepping motor
Limit Sensor Equipped
Origin Sensor None
Proximity Origin Sensor None
Signal Cycle 2μm
Scale Cable* 2m *Scale cable comes directly out of the stage. Please prepare "extension cable for scale" separately if 2m or longer cable are needed.
Compatible Controller FC-911
Compatible Cable PM-CA-*
i
50mm Travel X-axis Motor Stage, 1nm resolution, 120X120mm, M4 Thd
FS-1050UPX
120×120mm
6-12 weeks
€7,885.70
Travel 50mm
Stage Size 120×120mm
Weight 98N(10kgf)
Minimum Resolution *1 1nm
Positional Repeatability *1 ±2nm
Running Parallelism 10μm
Maximum Travel Speed 5mm/sec
*1 Minimum resolution and position repeatability accuracy for built-in scale read.
Primary Material Aluminum
Finish Black anodized
Motor Type □28mm 5 phase stepping motor
Limit Sensor Equipped
Origin Sensor None
Proximity Origin Sensor None
Signal Cycle 2μm
Scale Cable* 2m *Scale cable comes directly out of the stage. Please prepare "extension cable for scale" separately if 2m or longer cable are needed.
Compatible Controller FC-911
Compatible Cable PM-CA-*

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