1nm Feedback Stage - 175x120mm

NFS120-100UPX

CE
High resolution feedback stage with 5-phase stepping motor, built-in glass scale, and CE/UKCA marking. The built-in optical glass scale provides high positional repeatability and high resolution. The 1 nm Feedback Stage is available in 6 different table sizes.
  • Ball screw drive allows longer travel than piezo stages, and a wide variety of travel and table sizes can be selected.
  • A plugin for the "Autoconfig" function is equipped for user convenience.
  • Controllers compatible with the Feedback Stage (NFS series) are available.
More Information
Name 1nm Feedback Stage - 175x120mm
Weight 4.0000kgs
Guide
  • Use a controller (SHRC-203) compatible with Feedback Stage (NFS series).
Attention
    *
  • When operating, use in an environment with minimal temperature fluctuation. (Recommended: 23±1℃)
  • Use the product in an environment with as little vibration as possible. Or use it in an anti-vibration environment.
  • Use in an environment free of oil mist. Otherwise, the glass scale may become contaminated and scale errors may occur.
  • Contact our Sales if you intend to mount a workpiece larger than the size of the table surface.
Travel 100mm
Load Capacity 98N (10.0kg)
Finish Black anodized
Feed Screw Ball screw diameter φ4mm, 1mm lead
Positioning Slide Crossed roller
Positioning Accuracy 1μm
Positional Repeatability 0.4μm
Minimal Incremental Motion 3nm
MAX Speed 5mm/sec
Moment Stiffness / Pitch 0.05″/N・cm
Moment Stiffness / Yaw 0.05″/N・cm
Moment Stiffness / Roll 0.05″/N・cm
Lost Motion 0.4μm
Backlash 1μm
Parallelism 50μm
Running Parallelism 10μm
Pitch 15″
Yaw 15″
Motor / Motor Type 5-phase stepping motor 0.75A/phase(Oriental Motor Co., Ltd.)
Motor / Motor Part Number PK523PMB-C5(□28mm)
Scale Resolution 1nm
Out of stock
SKU
NFS120-100UPX
€8,871.40
High resolution feedback stage with 5-phase stepping motor, built-in glass scale, and CE/UKCA marking. The built-in optical glass scale provides high positional repeatability and high resolution. The 1 nm Feedback Stage is available in 6 different table sizes.

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