Z-Axis Vacuum Compatible EXC Stainless Steel Stages

TSDS-3_TSDS-3L

Z-Axis Vacuum Compatible EXC Stainless Steel Stages
In stock
SKU
TSDS-3_TSDS-3L
These vertical travel Z-axis stages are available with either horizontal or vertical mounting surfaces. They are made for use in 1E-6 Torr vacuum or clean room environments and feature Opto Sigma's EXC™ precision bearing ways. These bearing ways are not separate parts, as with competing stages, but processed directly into the body and base of the stage resulting in the highest stiffness, straightness and smoothness of any stage on the market. They remain unmatched in overall performance to this day. TSDS stages are made completely from hardened 440C stainless steel for excellent cleanliness and corrosion resistance. Both the stage and the stainless steel micrometer head (included) have vented attachment holes and are lubricated with a high-grade vacuum grease (YVAC2).
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Name Stage Size Travel Load Capacity Mounting Thread Delivery Price Add to cart
i
40X40mm EXC Bearing, Vacuum Compatible, Stainless Steel, Z-Axis Stage, (Horizontal Platform/Base) Side Micrometer, +/-3mm, 6-32 Threads
TSDS-403UU
40×40mm ±3mm 88.3N (9.0kg) 6-32UNC
6-12 weeks
€654.80
Lead of Actuator 0.5mm
Micrometer Readable Resolution 0.01mm
Travel Accuracy / Straightness 2.5μm
Max. Moment Capacity / Pitch 3.9N・m
Max. Moment Capacity / Roll 1.0N・m
Moment Stiffness / Pitch 1.84″/N・cm
Moment Stiffness / Roll 1.84″/N・cm
Parallelism 80μm
Running Parallelism 20μm
i
65X65mm EXC Bearing, Vacuum Compatible, Stainless Steel, Z-Axis Stage, (Horizontal Platform/Base) Center Micrometer, +/-5mm, 1/4-20 Threads
TSDS-653UU
65×65mm ±5mm 147N (15.0kg) 1/4-20UNC
3-5 days
€712.20
Lead of Actuator 0.5mm
Micrometer Readable Resolution 0.01mm
Travel Accuracy / Straightness 2.5μm
Max. Moment Capacity / Pitch 6.9N・m
Max. Moment Capacity / Roll 6.9N・m
Moment Stiffness / Pitch 0.51″/N・cm
Moment Stiffness / Roll 0.51″/N・cm
Parallelism 80μm
Running Parallelism 25μm
i
40X40mm EXC Bearing, Vacuum Compatible, Stainless Steel, Z-Axis Stage, (Vertical Platform/Horizontal Base) Side Micrometer, +/-6.5mm, 6-32 Threads
TSDS-403LUU
40×40mm ±6.5mm 49N (5.0kg) 6-32UNC
3-5 days
€556.50
Lead of Actuator 0.5mm
Micrometer Readable Resolution 0.01mm
Travel Accuracy / Straightness 1μm
Max. Moment Capacity / Pitch 5N・m
Max. Moment Capacity / Roll 5N・m
Moment Stiffness / Pitch 0.6″/N・cm
Parallelism 30μm
Running Parallelism 20μm
i
65X65mm EXC Bearing, Vacuum Compatible, Stainless Steel, Z-Axis Stage, (Vertical Platform/Horizontal Base) Side Micrometer, +/-6.5mm, 1/4-20 Threads
TSDS-653LUU
65×65mm ±6.5mm 49N (5.0kg) 1/4-20UNC
6-12 weeks
€666.30
Lead of Actuator 0.5mm
Micrometer Readable Resolution 0.01mm
Travel Accuracy / Straightness 1μm
Max. Moment Capacity / Pitch 8N・m
Max. Moment Capacity / Roll 8N・m
Moment Stiffness / Pitch 0.25″/N・cm
Parallelism 30μm
Running Parallelism 20μm
i
25X25mm EXC Bearing, Vacuum Compatible, Stainless Steel, Z-Axis Stage, (Horizontal Platform/Base) Center Micrometer, +/-3mm, M2 Threads
TSDS-253
25×25mm ±3mm 29.4N (3.0kg) M2
in stock
€620.30
Lead of Actuator 0.5mm
Micrometer Readable Resolution 0.01mm
Travel Accuracy / Straightness 5μm
Max. Moment Capacity / Pitch 1.0N・m
Max. Moment Capacity / Roll 1.0N・m
Moment Stiffness / Pitch 7.14″/N・cm
Moment Stiffness / Roll 7.15″/N・cm
Parallelism 80μm
Running Parallelism 15μm
i
60X60mm EXC Bearing, Vacuum Compatible, Stainless Steel, Z-Axis Stage, (Horizontal Platform/Base) Center Micrometer, +/-5mm, M4 Threads
TSDS-603
60×60mm ±5mm 147N (15.0kg) M4
3-5 days
€712.20
Lead of Actuator 0.5mm
Micrometer Readable Resolution 0.01mm
Travel Accuracy / Straightness 2.5μm
Max. Moment Capacity / Pitch 6.9N・m
Max. Moment Capacity / Roll 6.9N・m
Moment Stiffness / Pitch 0.51″/N・cm
Moment Stiffness / Roll 0.51″/N・cm
Parallelism 80μm
Running Parallelism 25μm
i
25X25mm EXC Bearing, Vacuum Compatible, Stainless Steel, Z-Axis Stage, (Vertical Platform/Horizontal Base) Center Micrometer, +/-3mm, M2 Threads
TSDS-253L
25×25mm ±3mm 14.7N (1.5kg) M2
6-12 weeks
€494.00
Lead of Actuator 0.5mm
Micrometer Readable Resolution 0.01mm
Travel Accuracy / Straightness 1μm
Max. Moment Capacity / Pitch 2.2N・m
Max. Moment Capacity / Roll 2.1N・m
Moment Stiffness / Pitch 3.3″/N・cm
Parallelism 30μm
Running Parallelism 20μm
i
60X60mm EXC Bearing, Vacuum Compatible, Stainless Steel, Z-Axis Stage, (Vertical Platform/Horizontal Base) Center Micrometer, +/-6.5mm, M4 Threads
TSDS-603L
60×60mm ±6.5mm 49N (5.0kg) M4
3-5 days
€666.30
Lead of Actuator 0.5mm
Micrometer Readable Resolution 0.01mm
Travel Accuracy / Straightness 1μm
Max. Moment Capacity / Pitch 8N・m
Max. Moment Capacity / Roll 8N・m
Moment Stiffness / Pitch 0.25″/N・cm
Parallelism 30μm
Running Parallelism 20μm
i
40X40mm EXC Bearing, Vacuum Compatible, Stainless Steel, Z-Axis Stage, (Horizontal Platform/Base) Center Micrometer, +/-3mm, M3 Threads
TSDS-403
40×40mm ±3mm 88.3N (9.0kg) M3
3-5 days
€654.80
Lead of Actuator 0.5mm
Micrometer Readable Resolution 0.01mm
Travel Accuracy / Straightness 2.5μm
Max. Moment Capacity / Pitch 3.9N・m
Max. Moment Capacity / Roll 1.0N・m
Moment Stiffness / Pitch 1.84″/N・cm
Moment Stiffness / Roll 1.84″/N・cm
Parallelism 80μm
Running Parallelism 20μm
i
65X65mm EXC Bearing, Vacuum Compatible, Stainless Steel, Z-Axis Stage, (Horizontal Platform/Base) Center Micrometer, +/-5mm, M6 Threads
TSDS-653-M6
65×65mm ±5mm 147N (15.0kg) M6
6-12 weeks
€712.20
Lead of Actuator 0.5mm
Micrometer Readable Resolution 0.01mm
Travel Accuracy / Straightness 2.5μm
Max. Moment Capacity / Pitch 6.9N・m
Max. Moment Capacity / Roll 6.9N・m
Moment Stiffness / Pitch 0.51″/N・cm
Moment Stiffness / Roll 0.51″/N・cm
Parallelism 80μm
Running Parallelism 25μm
i
40X40mm EXC Bearing, Vacuum Compatible, Stainless Steel, Z-Axis Stage, (Vertical Platform/Horizontal Base) Side Micrometer, +/-6.5mm, M3 Threads
TSDS-403L
40×40mm ±6.5mm 49N (5.0kg) M3
in stock
€556.50
Lead of Actuator 0.5mm
Micrometer Readable Resolution 0.01mm
Travel Accuracy / Straightness 1μm
Max. Moment Capacity / Pitch 5N・m
Max. Moment Capacity / Roll 5N・m
Moment Stiffness / Pitch 0.6″/N・cm
Parallelism 30μm
Running Parallelism 20μm
i
65X65mm EXC Bearing, Vacuum Compatible, Stainless Steel, Z-Axis Stage, (Vertical Platform/Horizontal Base) Side Micrometer, +/-6.5mm, M6 Threads
TSDS-653L-M6
65×65mm ±6.5mm 49N (5.0kg) M6
6-12 weeks
€666.30
Lead of Actuator 0.5mm
Micrometer Readable Resolution 0.01mm
Travel Accuracy / Straightness 1μm
Max. Moment Capacity / Pitch 8N・m
Max. Moment Capacity / Roll 8N・m
Moment Stiffness / Pitch 0.25″/N・cm
Parallelism 30μm
Running Parallelism 20μm

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