Piezo Flexure Vertical Axis Stage 40mm Size
SFS-H40Z(CL)
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Nanometer resolution high stiffness flexure stages.
| Name | Piezo Flexure Vertical Axis Stage 40mm Size |
|---|---|
| Weight | 0.2800kgs |
| Guide | - |
| Attention |
|
| Travel (at open-loop control) | 100μm±15% |
| Load Capacity | 6.7N (0.7kg) |
| Travel (at open-loop control) | 100μm±15％ |
| Stage Size | 40×40mm |
| Actuator | Piezo actuator |
| Theoretical Resolution (open-loop | 1nm |
| Resolution (closed-loop) | 10nm |
| Linearity | ＜0.3％ |
| Perpendicularity (Horizontal Direction) | 1μm |
| Positional Repeatability | ＜0.1μm |
| Load Capacity | 6.7N(0.7kgf) |
| Micro-displacement Sensor | Digital Sensor |
| Compatible Cable | Attached cable (2m) |
In stock
SKU
SFS-H40Z(CL)
€2,464.30
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Nanometer resolution high stiffness flexure stages.
