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1nm Feedback Stages

NFS-UPX

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1nm Feedback Stages
Out of stock
SKU
NFS-UPX
High resolution feedback stage with 5-phase stepping motor, built-in glass scale, and CE/UKCA marking. The built-in optical glass scale provides high positional repeatability and high resolution.
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Travel
Material
Load Capacity
Stage Size
Delivery Price Add to cart
details
NFS60-20UPX
20mm Aluminium 49N (5.0kg)
1 week
€6,900.00
Finish Black anodized
Feed Screw Ball screw diameter φ4mm, 1mm lead
Positioning Slide Crossed roller
Positioning Accuracy 1μm
Positional Repeatability 0.4μm
Minimal Incremental Motion 3nm
MAX Speed 5mm/sec
Moment Stiffness / Pitch 0.5″/N･cm
Moment Stiffness / Yaw 0.5″/N･cm
Moment Stiffness / Roll 0.5″/N･cm
Lost Motion 0.4μm
Backlash 1μm
Parallelism 50μm
Running Parallelism 10μm
Pitch 15″
Yaw 15″
Motor / Motor Type 5-phase stepping motor 0.75A/phase（Oriental Motor Co., Ltd.）
Motor / Motor Part Number PK523PMB-C5（□28mm）
Scale Resolution 1nm
details
NFS100-100UPX
100mm 98N (10.0kg)
1 week
€8,871.40
Finish Black anodized
Feed Screw Ball screw diameter φ4mm, 1mm lead
Positioning Slide Crossed roller
Positioning Accuracy 1μm
Positional Repeatability 0.4μm
Minimal Incremental Motion 3nm
MAX Speed 5mm/sec
Moment Stiffness / Pitch 0.05″/N･cm
Moment Stiffness / Yaw 0.05″/N･cm
Moment Stiffness / Roll 0.05″/N･cm
Lost Motion 0.4μm
Backlash 1μm
Parallelism 50μm
Running Parallelism 10μm
Pitch 15″
Yaw 15″
Motor / Motor Type 5-phase stepping motor 0.75A/phase（Oriental Motor Co., Ltd.）
Motor / Motor Part Number PK523PMB-C5（□28mm）
Scale Resolution 1nm
details
NFS60-40UPX
40mm 49N (5.0kg)
1 week
€7,392.90
Finish Black anodized
Feed Screw Ball screw diameter φ4mm, 1mm lead
Positioning Slide Crossed roller
Positioning Accuracy 1μm
Positional Repeatability 0.4μm
Minimal Incremental Motion 3nm
MAX Speed 5mm/sec
Moment Stiffness / Pitch 0.05″/N･cm
Moment Stiffness / Yaw 0.05″/N･cm
Moment Stiffness / Roll 0.05″/N･cm
Lost Motion 0.4μm
Backlash 1μm
Parallelism 50μm
Running Parallelism 10μm
Pitch 15″
Yaw 15″
Motor / Motor Type 5-phase stepping motor 0.75A/phase（Oriental Motor Co., Ltd.）
Motor / Motor Part Number PK523PMB-C5（□28mm）
Scale Resolution 1nm
details
NFS120-50UPX
50mm 98N (10.0kg) 120×120mm
1 week
€7,885.70
Finish Black anodized
Feed Screw Ball screw diameter φ4mm, 1mm lead
Positioning Slide Crossed roller
Positioning Accuracy 1μm
Positional Repeatability 0.4μm
Minimal Incremental Motion 3nm
MAX Speed 5mm/sec
Moment Stiffness / Pitch 0.05″/N･cm
Moment Stiffness / Yaw 0.05″/N･cm
Moment Stiffness / Roll 0.05″/N･cm
Lost Motion 0.4μm
Backlash 1μm
Parallelism 50μm
Running Parallelism 10μm
Pitch 15″
Yaw 15″
Motor / Motor Type 5-phase stepping motor 0.75A/phase（Oriental Motor Co., Ltd.）
Motor / Motor Part Number PK523PMB-C5（□28mm）
Scale Resolution 1nm
details
NFS100-50UPX
50mm 98N (10.0kg) 100×100mm
1 week
€7,885.70
Finish Black anodized
Feed Screw Ball screw diameter φ4mm, 1mm lead
Positioning Slide Crossed roller
Positioning Accuracy 1μm
Positional Repeatability 0.4μm
Minimal Incremental Motion 3nm
MAX Speed 5mm/sec
Moment Stiffness / Pitch 0.05″/N･cm
Moment Stiffness / Yaw 0.05″/N･cm
Moment Stiffness / Roll 0.05″/N･cm
Lost Motion 0.4μm
Backlash 1μm
Parallelism 50μm
Running Parallelism 10μm
Pitch 15″
Yaw 15″
Motor / Motor Type 5-phase stepping motor 0.75A/phase（Oriental Motor Co., Ltd.）
Motor / Motor Part Number PK523PMB-C5（□28mm）
Scale Resolution 1nm
details
NFS120-100UPX
100mm 98N (10.0kg)
1 week
€8,871.40
Finish Black anodized
Feed Screw Ball screw diameter φ4mm, 1mm lead
Positioning Slide Crossed roller
Positioning Accuracy 1μm
Positional Repeatability 0.4μm
Minimal Incremental Motion 3nm
MAX Speed 5mm/sec
Moment Stiffness / Pitch 0.05″/N･cm
Moment Stiffness / Yaw 0.05″/N･cm
Moment Stiffness / Roll 0.05″/N･cm
Lost Motion 0.4μm
Backlash 1μm
Parallelism 50μm
Running Parallelism 10μm
Pitch 15″
Yaw 15″
Motor / Motor Type 5-phase stepping motor 0.75A/phase（Oriental Motor Co., Ltd.）
Motor / Motor Part Number PK523PMB-C5（□28mm）
Scale Resolution 1nm

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Ball screw drive allows longer travel than piezo stages, and a wide variety of travel and table sizes can be selected. A plugin for the "Autoconfig" function is equipped for user convenience. Controllers compatible with the Feedback Stage (NFS series) are available. The 1 nm Feedback Stage is available in 6 different table sizes.