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5nm-Resolution Stage Controllers, 2-axes, for FS-SPX Series Stages

FC-611

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Dedicated controller for 5nm feedback stage (FS-SPX series) to control with 5nm resolution.
Highly safe and easy to operate with various error detection functions, general-purpose I / O, and teaching functions.

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SKU

FC-611

Dedicated controller for 5nm feedback stage (FS-SPX series) to control with 5nm resolution.
Highly safe and easy to operate with various error detection functions, general-purpose I / O, and teaching functions.

5nm-Resolution Stage Controllers, 2-axes, for FS-SPX Series Stages

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