FS-SPX Dedicated Controller for 5nm Ｆeedback Stage

CONTROL_FS_SPX

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CONTROL_FS_SPX

Dedicated controller for 5nm feedback stage (FS-SPX series) to control with 5nm resolution.
Highly safe and easy to operate with various error detection functions, general-purpose I / O, and teaching functions.

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5nm-Resolution Stage Controllers, 2-axes, for FS-SPX Series Stages
FC-611

6-12 weeks

Number of Control Axes	2 axes
Minimum Command Unit	5nm
In Position Range	+/- 5nm (+/- 15,+/- 35nm selectable)
Max Operating Speed Set Value	30mm/sec
Max Travel Range Set Value	-671.088640～+671.088635mm
Number of Control Interface Port	Jog Controller

Teaching	Number of Register Channel
Power Voltage	AC100 - 240V 50/60Hz
Power Supply Voltage Fluctuation Allowable Range	AC90V - 264V
Power Consumption	110VA
Fuse	250V, 2.5A, time lag, 2
External Dimensions (W×H×D)	W220×H88×D290mm
Weight	5.2㎏
Operating temperature/ Humidity	0℃ - 40℃/20% - 80%RH(without condensation)
Storage Temperature/ Humidity	ー10℃ - 55℃/20% - 80%RH(without condensation)
Connectable Option	JC-01
Communication Port	GP-IB
General I/O	Input
Emergency Stop Input	B contact (fixed)

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