Piezo Flexure Single Axis Stage 60mm Size
SFS-H60X(CL)
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Nanometer resolution high stiffness flexure stages.
| Name | Piezo Flexure Single Axis Stage 60mm Size |
|---|---|
| Gewicht | 0.4000kgs |
| Leitfaden | - |
| Achtung |
|
| Verfahrweg (bei offenen Steuerung) | 100μm±15% |
| Ladekapazität | 19.6N (2.0kg) |
| Travel (at open-loop control) | 100μm±15％ |
| Stage Size | 60×60mm |
| Actuator | Piezo actuator |
| Theoretical Resolution (open-loop | 1nm |
| Resolution (closed-loop) | 10nm |
| Linearity | ＜0.3％ |
| Perpendicularity (Horizontal Direction) | 1μm |
| Positional Repeatability | ＜0.1μm |
| Load Capacity | 19.6N(2.0kgf) |
| Micro-displacement Sensor | Digital Sensor |
| Compatible Cable |
FINE-CA-3: For piezo DS1-CA-3: For digital sensor |
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SKU
SFS-H60X(CL)
2.464,30 €
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Nanometer resolution high stiffness flexure stages.
