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SKU
NFS-X
High resolution feedback stage with 5-phase stepping motor, built-in glass scale, and CE/UKCA marking. The built-in optical glass scale provides high positional repeatability and high resolution.
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Ball screw drive allows longer travel than piezo stages, and a wide variety of travel and table sizes can be selected.
A plugin for the "Autoconfig" function is equipped for user convenience.
Controllers compatible with the Feedback Stage (NFS series) are available.
The 50 nm Feedback Stage is available in 6 different table sizes.