1nm Feedback Stages

NFS-UPX

Nicht lieferbar

SKU

NFS-UPX

High resolution feedback stage with 5-phase stepping motor, built-in glass scale, and CE/UKCA marking. The built-in optical glass scale provides high positional repeatability and high resolution.

Zur Wunschliste hinzufügen

Customize product

Filter

Enabled filters :

Remove all filters

Name

Verfahrweg

Ladekapazität

Achsengröße

Material

Delivery

Preis

Add to cart

details

NFS60-40UPX

40mm

49N (5.0kg)

1 week

7.392,90 €

Finish	Black anodized
Feed Screw	Ball screw diameter φ4mm, 1mm lead
Positioning Slide	Crossed roller
Positioning Accuracy	1μm
Positional Repeatability	0.4μm
Minimal Incremental Motion	3nm
MAX Speed	5mm/sec
Moment Stiffness / Pitch	0.05″/N･cm
Moment Stiffness / Yaw	0.05″/N･cm
Moment Stiffness / Roll	0.05″/N･cm
Lost Motion	0.4μm
Backlash	1μm
Parallelism	50μm
Running Parallelism	10μm
Pitch	15″
Yaw	15″
Motor / Motor Type	5-phase stepping motor 0.75A/phase（Oriental Motor Co., Ltd.）
Motor / Motor Part Number	PK523PMB-C5（□28mm）
Scale Resolution	1nm

details

NFS120-50UPX

50mm

98N (10.0kg)

120×120mm

1 week

7.885,70 €

Finish	Black anodized
Feed Screw	Ball screw diameter φ4mm, 1mm lead
Positioning Slide	Crossed roller
Positioning Accuracy	1μm
Positional Repeatability	0.4μm
Minimal Incremental Motion	3nm
MAX Speed	5mm/sec
Moment Stiffness / Pitch	0.05″/N･cm
Moment Stiffness / Yaw	0.05″/N･cm
Moment Stiffness / Roll	0.05″/N･cm
Lost Motion	0.4μm
Backlash	1μm
Parallelism	50μm
Running Parallelism	10μm
Pitch	15″
Yaw	15″
Motor / Motor Type	5-phase stepping motor 0.75A/phase（Oriental Motor Co., Ltd.）
Motor / Motor Part Number	PK523PMB-C5（□28mm）
Scale Resolution	1nm

details

NFS100-50UPX

50mm

98N (10.0kg)

100×100mm

1 week

7.885,70 €

Finish	Black anodized
Feed Screw	Ball screw diameter φ4mm, 1mm lead
Positioning Slide	Crossed roller
Positioning Accuracy	1μm
Positional Repeatability	0.4μm
Minimal Incremental Motion	3nm
MAX Speed	5mm/sec
Moment Stiffness / Pitch	0.05″/N･cm
Moment Stiffness / Yaw	0.05″/N･cm
Moment Stiffness / Roll	0.05″/N･cm
Lost Motion	0.4μm
Backlash	1μm
Parallelism	50μm
Running Parallelism	10μm
Pitch	15″
Yaw	15″
Motor / Motor Type	5-phase stepping motor 0.75A/phase（Oriental Motor Co., Ltd.）
Motor / Motor Part Number	PK523PMB-C5（□28mm）
Scale Resolution	1nm

details

NFS120-100UPX

100mm

98N (10.0kg)

1 week

8.871,40 €

Finish	Black anodized
Feed Screw	Ball screw diameter φ4mm, 1mm lead
Positioning Slide	Crossed roller
Positioning Accuracy	1μm
Positional Repeatability	0.4μm
Minimal Incremental Motion	3nm
MAX Speed	5mm/sec
Moment Stiffness / Pitch	0.05″/N･cm
Moment Stiffness / Yaw	0.05″/N･cm
Moment Stiffness / Roll	0.05″/N･cm
Lost Motion	0.4μm
Backlash	1μm
Parallelism	50μm
Running Parallelism	10μm
Pitch	15″
Yaw	15″
Motor / Motor Type	5-phase stepping motor 0.75A/phase（Oriental Motor Co., Ltd.）
Motor / Motor Part Number	PK523PMB-C5（□28mm）
Scale Resolution	1nm

details

NFS60-20UPX

20mm

49N (5.0kg)

Aluminium

6-12 weeks

6.900,00 €

Finish	Black anodized
Feed Screw	Ball screw diameter φ4mm, 1mm lead
Positioning Slide	Crossed roller
Positioning Accuracy	1μm
Positional Repeatability	0.4μm
Minimal Incremental Motion	3nm
MAX Speed	5mm/sec
Moment Stiffness / Pitch	0.5″/N･cm
Moment Stiffness / Yaw	0.5″/N･cm
Moment Stiffness / Roll	0.5″/N･cm
Lost Motion	0.4μm
Backlash	1μm
Parallelism	50μm
Running Parallelism	10μm
Pitch	15″
Yaw	15″
Motor / Motor Type	5-phase stepping motor 0.75A/phase（Oriental Motor Co., Ltd.）
Motor / Motor Part Number	PK523PMB-C5（□28mm）
Scale Resolution	1nm

details

NFS100-100UPX

100mm

98N (10.0kg)

1 week

8.871,40 €

Finish	Black anodized
Feed Screw	Ball screw diameter φ4mm, 1mm lead
Positioning Slide	Crossed roller
Positioning Accuracy	1μm
Positional Repeatability	0.4μm
Minimal Incremental Motion	3nm
MAX Speed	5mm/sec
Moment Stiffness / Pitch	0.05″/N･cm
Moment Stiffness / Yaw	0.05″/N･cm
Moment Stiffness / Roll	0.05″/N･cm
Lost Motion	0.4μm
Backlash	1μm
Parallelism	50μm
Running Parallelism	10μm
Pitch	15″
Yaw	15″
Motor / Motor Type	5-phase stepping motor 0.75A/phase（Oriental Motor Co., Ltd.）
Motor / Motor Part Number	PK523PMB-C5（□28mm）
Scale Resolution	1nm

You must be logged in to ask questions

Ball screw drive allows longer travel than piezo stages, and a wide variety of travel and table sizes can be selected. A plugin for the "Autoconfig" function is equipped for user convenience. Controllers compatible with the Feedback Stage (NFS series) are available. The 1 nm Feedback Stage is available in 6 different table sizes.