10nm Feedback Stages

NFS-PX

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NFS-PX

High resolution feedback stage with 5-phase stepping motor, built-in glass scale, and CE/UKCA marking. The built-in optical glass scale provides high positional repeatability and high resolution.

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10nm Feedback Stage - 100x100mm
NFS100-50PX

100×100mm

50mm

98N (10.0kg)

6-12 weeks

4.435,70 €

Finish	Black anodized
Feed Screw	Ball screw diameter φ4mm, 1mm lead
Positioning Slide	Crossed roller
Positioning Accuracy	1μm
Positional Repeatability	0.4μm
Minimal Incremental Motion	3nm
MAX Speed	5mm/sec
Moment Stiffness / Pitch	0.05″/N･cm
Moment Stiffness / Yaw	0.05″/N･cm
Moment Stiffness / Roll	0.05″/N･cm
Lost Motion	0.4μm
Backlash	1μm
Parallelism	50μm
Running Parallelism	10μm
Pitch	15″
Yaw	15″
Motor / Motor Type	5-phase stepping motor 0.75A/phase（Oriental Motor Co., Ltd.）
Motor / Motor Part Number	PK523PMB-C5（□28mm）
Scale Resolution	1nm

10nm Feedback Stage - 175x120mm
NFS120-100PX

100mm

98N (10.0kg)

6-12 weeks

5.421,40 €

Finish	Black anodized
Feed Screw	Ball screw diameter φ4mm, 1mm lead
Positioning Slide	Crossed roller
Positioning Accuracy	1μm
Positional Repeatability	0.4μm
Minimal Incremental Motion	3nm
MAX Speed	5mm/sec
Moment Stiffness / Pitch	0.05″/N･cm
Moment Stiffness / Yaw	0.05″/N･cm
Moment Stiffness / Roll	0.05″/N･cm
Lost Motion	0.4μm
Backlash	1μm
Parallelism	50μm
Running Parallelism	10μm
Pitch	15″
Yaw	15″
Motor / Motor Type	5-phase stepping motor 0.75A/phase（Oriental Motor Co., Ltd.）
Motor / Motor Part Number	PK523PMB-C5（□28mm）
Scale Resolution	1nm

10nm Feedback Stage - 75x60mm
NFS60-20PX

20mm

49N (5.0kg)

3-5 days

3.450,00 €

Finish	Black anodized
Feed Screw	Ball screw diameter φ4mm, 1mm lead
Positioning Slide	Crossed roller
Positioning Accuracy	1μm
Positional Repeatability	0.4μm
Minimal Incremental Motion	3nm
MAX Speed	5mm/sec
Moment Stiffness / Pitch	0.05″/N･cm
Moment Stiffness / Yaw	0.05″/N･cm
Moment Stiffness / Roll	0.05″/N･cm
Lost Motion	0.4μm
Backlash	1μm
Parallelism	50μm
Running Parallelism	10μm
Pitch	15″
Yaw	15″
Motor / Motor Type	5-phase stepping motor 0.75A/phase（Oriental Motor Co., Ltd.）
Motor / Motor Part Number	PK523PMB-C5（□28mm）
Scale Resolution	1nm

10nm Feedback Stage - 175x100mm
NFS100-100PX

100mm

98N (10.0kg)

6-12 weeks

5.421,40 €

Finish	Black anodized
Feed Screw	Ball screw diameter φ4mm, 1mm lead
Positioning Slide	Crossed roller
Positioning Accuracy	1μm
Positional Repeatability	0.4μm
Minimal Incremental Motion	3nm
MAX Speed	5mm/sec
Moment Stiffness / Pitch	0.05″/N･cm
Moment Stiffness / Yaw	0.05″/N･cm
Moment Stiffness / Roll	0.05″/N･cm
Lost Motion	0.4μm
Backlash	1μm
Parallelism	50μm
Running Parallelism	10μm
Pitch	15″
Yaw	15″
Motor / Motor Type	5-phase stepping motor 0.75A/phase（Oriental Motor Co., Ltd.）
Motor / Motor Part Number	PK523PMB-C5（□28mm）
Scale Resolution	1nm

10nm Feedback Stage - 230x180mm
NFS180-200PX

200mm

196N (20.0kg)

6-12 weeks

7.590,00 €

Finish	Black anodized
Feed Screw	Ball screw diameter φ4mm, 1mm lead
Positioning Slide	Crossed roller
Positioning Accuracy	1μm
Positional Repeatability	0.4μm
Minimal Incremental Motion	3nm
MAX Speed	5mm/sec
Moment Stiffness / Pitch	0.05″/N･cm
Moment Stiffness / Yaw	0.05″/N･cm
Moment Stiffness / Roll	0.05″/N･cm
Lost Motion	0.4μm
Backlash	1μm
Parallelism	50μm
Running Parallelism	10μm
Pitch	15″
Yaw	15″
Motor / Motor Type	5-phase stepping motor 0.75A/phase（Oriental Motor Co., Ltd.）
Motor / Motor Part Number	PK523PMB-C5（□28mm）
Scale Resolution	1nm

10nm Feedback Stage - 110x60mm
NFS60-40PX

±40mm

49N (5.0kg)

3-5 days

4.238,60 €

Finish	Black anodized
Feed Screw	Ball screw diameter φ4mm, 1mm lead
Positioning Slide	Crossed roller
Positioning Accuracy	1μm
Positional Repeatability	0.4μm
Minimal Incremental Motion	3nm
MAX Speed	5mm/sec
Moment Stiffness / Pitch	0.05″/N･cm
Moment Stiffness / Yaw	0.05″/N･cm
Moment Stiffness / Roll	0.05″/N･cm
Lost Motion	0.4μm
Backlash	1μm
Parallelism	50μm
Running Parallelism	10μm
Pitch	15″
Yaw	15″
Motor / Motor Type	5-phase stepping motor 0.75A/phase（Oriental Motor Co., Ltd.）
Motor / Motor Part Number	PK523PMB-C5（□28mm）
Scale Resolution	1nm

10nm Feedback Stage - 120x120mm
NFS120-50PX

120×120mm

50mm

98N (10.0kg)

6-12 weeks

4.435,70 €

Finish	Black anodized
Feed Screw	Ball screw diameter φ4mm, 1mm lead
Positioning Slide	Crossed roller
Positioning Accuracy	1μm
Positional Repeatability	0.4μm
Minimal Incremental Motion	3nm
MAX Speed	5mm/sec
Moment Stiffness / Pitch	0.05″/N･cm
Moment Stiffness / Yaw	0.05″/N･cm
Moment Stiffness / Roll	0.05″/N･cm
Lost Motion	0.4μm
Backlash	1μm
Parallelism	50μm
Running Parallelism	10μm
Pitch	15″
Yaw	15″
Motor / Motor Type	5-phase stepping motor 0.75A/phase（Oriental Motor Co., Ltd.）
Motor / Motor Part Number	PK523PMB-C5（□28mm）
Scale Resolution	1nm

10nm Feedback Stage - 330x180mm
NFS180-300PX

300mm

196N (20.0kg)

6-12 weeks

8.082,90 €

Finish	Black anodized
Feed Screw	Ball screw diameter φ4mm, 1mm lead
Positioning Slide	Crossed roller
Positioning Accuracy	1μm
Positional Repeatability	0.4μm
Minimal Incremental Motion	3nm
MAX Speed	5mm/sec
Moment Stiffness / Pitch	0.05″/N･cm
Moment Stiffness / Yaw	0.05″/N･cm
Moment Stiffness / Roll	0.05″/N･cm
Lost Motion	0.4μm
Backlash	1μm
Parallelism	50μm
Running Parallelism	10μm
Pitch	15″
Yaw	15″
Motor / Motor Type	5-phase stepping motor 0.75A/phase（Oriental Motor Co., Ltd.）
Motor / Motor Part Number	PK523PMB-C5（□28mm）
Scale Resolution	1nm

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Ball screw drive allows longer travel than piezo stages, and a wide variety of travel and table sizes can be selected. A plugin for the "Autoconfig" function is equipped for user convenience. Controllers compatible with the Feedback Stage (NFS series) are available. The 10 nm Feedback Stage is available in 6 different table sizes.

10nm Feedback Stages

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