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VOBC
These are low outgassing optical baseplates for installing optical system and positioning equipment in the high vacuum chamber.
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◦ The VOBC has M6 tapped holes on 25mm matrix over the entire surface. Various bases and the stainless stage (TSDS-654-M6) can be fixed.
◦ To minimize outgassing, venting hole and grooving are provided onto all of the screw holes.
◦ To minimize outgassing, venting hole and grooving are provided onto all of the screw holes.
