Motorized Linear Stages

Motorized Linear Stages


guide product

Selection Guide for Linear Motorized Stages

 

Groups

Description

Travel Ranges

Platform Sizes

Load Capacity

Mounting Threads

Max. Speed

Repeatability

Minimum Incremental Motion

Axis Options

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Low-Cost Stages

HPS motorized stages, with ball screws and extended contact bearings offer mid to upper level performance at a low price.

20, 50, 60 mm

  • 60X60
  • 80X80
  • 120X120mm

5 – 10kg

Metric: M4

10mm/sec

±1μm

0.1μm

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Compact Stages

TAMM motorized crossed roller stages combine compactness, low-profile, and high durability. They feature anti-creep crossed roller bearings, special nut-shape ball screw, and black anodized aluminum body.

10, 15, 50, 100mm

  • 40X40
  • 60X60
  • 100X100
  • 100X175mm

3 – 10kg

Metric: M4

10mm/sec

±1μm

0.1-0.2μm

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Standard Stages

OSMS standard stepping motor driven stages have the most SKU options of all our stages. They are ideal for positioning of measuring instruments or inspection tools from which high stiffness and high precision are required. Both 2-phase and 5-phase types are available.

35, 50, 85, 100, 200, 300, 500mm

  • 85X85
  • 100X100
  • 100X175
  • 120X120mm

3-20kg

Metric: M4, M6 Imperial: ¼-20

25-40mm/sec

±1.5 - 3μm

0.2-0.4μm

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High Load Stages

HST stages are fitted with precision ball screws and precision crossed roller. The combination of HST Series and 3 axis Stage Controllers HSC-103 can perform low-noise and low-vibration operation, compared with conventional products. Steel body offers excellent stiffness and high load capacity.

50, 100, 200mm

  • 165X165
  • 165X220
  • 165X420mm

40kg

Metric: M4, M6

10-20mm/sec

±1μm

0.1μm

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Closed-Loop Feedback Stages

OSMS(CS) closed loop motorized stages have optical scales making them a highly accurate and reliable system. The compact scale is built in to keep the envelope dimensions the same as that of the equivalent open loop OSMS series.

35, 85, 100, 200, 300, 500mm

  • 85X85
  • 100X100
  • 120X120mm

3-20kg

Metric: M4, M6 Imperial: ¼-20

25-100mm/sec

±1 - 1.5μm

0.2-0.4μm

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AC Servo Motor Stages

SGMV High accuracy / high stiffness stages are driven by AC servo motors. AC motors incorporate encoders for providing feedback and closed-loop control. These motors can be positioned to high accuracy.

35, 85, 100, 200mm

  • 60X60
  • 80X80

8-13kg

Metric: M4, M6

35mm/sec

±2μm - 3μm

2μm

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Nano-Resolution Stage Systems

FS- Stages have up to 1nm positioning resolution. In-house optical linear encoders are built-in at the center of stage to detect position which is achieved by feedback control using position information of the encoder. They are ideal for collecting the data over a wide range.

20, 50, 100, 150, 200, 300, 400mm

  • 60X60
  • 80X80
  • 120X120
  • 120X170
  • 160X230mm

5 – 10kg

Metric: M4, M6

5mm/sec

±0.002-0.010μm

0.001-0.050μm

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Vertical Travel Flat Stages

OSMS Z axis stages offer high stiffness and high precision. The mounting platform is oriented parallel to the base and is perpendicular to the direction of travel to minimize footprint.

5, 10, 20mm

  • 40X40
  • 60X60
  • 80X80mm

2-15kg

Metric: M3, M4

1-4mm/sec

±2.5μm

0.05-0.10μm

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Silent Ultrasonic Linear Stages

PKA translation stages provide silent, high resolution position. While the drive source is a small ultrasonic motor, high load capacity of 2gk is ensured.

15, 20mm

  • 40X40
  • 60X60mm

2kg

Metric: M3, M4

0.5mm/sec

N/A

2μm

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Fine Piezo Stages

SFS piezo stages offer high precision and resolution positioning by utilizing full closed loop control with digital frequency based sensors. Using piezo element actuators, minimum incremental motion as small as 1nm.

266, 355, 532nm

  • 40X40
  • 60X60mm

7-15kg

Metric: M3, M4

NA

±0.05 μm

0.001-0.050μm

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Miniature Linear Stage

These objectives are designed with compensation for cover glass-thickness aberrations, making it possible to realize ideal beam spot size and quality while processing thorough a cover glass. These objective lenses can be used for laser repair processing for LCD or OLED modules.

10mm

  • 25X25mm

2kg

Metric: M2

10mm/sec

±1.5 μm

2μm

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Vacuum Compatible Stages

Motorized VSGSP stages are modified for use in high vacuum. These linear stages have available travel between 35 − 200mm and have a similar footprint to the SGSP series.

35, 85, 200mm

  • 60X60
  • 80X80mm

39-59kg

Metric: M3, M4

10-20mm/sec

±2.5 - 5μm

0.2μm

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Piezo-Assist Stages

TADC-SPA stages allow fine adjustment of 20nm or less by having a piezo assist mechanism integrated into the manual stage. They are ideal for manual stage units and systems that require high resolution position adjustment.

6, 13mm

  • 25X25
  • 40X40
  • 60X60mm
  • 65X65mm

4-5kg

Metric: M3, M4, M6

Imperial: ¼-20

NA

NA

0.020μm

 



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