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10nm-Resolution Stage Controllers, 2-axes, for FS-PX Series Stages (except FS-3200PX)

FC-511

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Dedicated controller for 10nm feedback stage (FS-PX series) to control with 10nm resolution.
Highly safe and easy to operate with various error detection functions, general-purpose I / O, and teaching functions.

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FC-511

Dedicated controller for 10nm feedback stage (FS-PX series) to control with 10nm resolution.
Highly safe and easy to operate with various error detection functions, general-purpose I / O, and teaching functions.

10nm-Resolution Stage Controllers, 2-axes, for FS-PX Series Stages (except FS-3200PX)

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